The semiconductor and PCB manufacturing industry extensively uses high-power radiation in the near UV (NUV) spectral ranges (i-line, CWL 365 nm/h-line, CWL 405 nm/g-line, CWL 436 nm) to create complex microstructures in photolithography processes. Significant applications involving photolithography include producing integrated circuits (ICs), liquid crystal (LCDs) and organic light-emitting diode (OLED) displays, MEMS (Microelectromechanical Systems), or printed circuit boards (PCBs).
There was no alternative to mercury discharge lamps in broadband UV exposure equipment for decades. Nowadays, this is changing as recent developments in UV-LED technology prove to be safer, as well as much more economical and reliable than conventional solutions. Retrofitting or designing new production tools employing UV-LED exposure is now facilitated by integrating Primelite’s advanced UV-LED light engines as a subsystem.
Mask aligners using our UV-LED light engines have proven to produce superior results in proximity as well as contact (soft/hard/vacuum) exposure applications.
With a Primelite UV-LED exposure unit integrated into your stepper, you can target resolutions down to 1 µm or even in the sub-micron range.
DMD/DLP® projection systems in HVM environments need high-performance UV light sources. We offer the most capable UV-LED DMD illuminator on the market.
Primelite’s UV-LED spot light sources are a perfect solution for wafer edge exposure, matching the relevant i-, h-, and g-line output of mercury arc lamps.
Flood exposure systems move away from conventional lamps. Our broadband UV-LED light sources make these applications safer, more economical, and very reliable.
Our fiber-coupled UV-LED exposure systems are very well suited to replace mercury arc lamps in your photomask inspection equipment.