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New ALE/2 Large Substrate UV-LED Exposure System

Primelite News: New UV-LED Large Substrate Exposure System

The Primelite engineering team has successfully concluded the development of the newest addition to our UV-LED product portfolio – the ALE/2.

This system aims to replace conventional mercury discharge lamps in the range of 3 to 5 kW. Similar to the ALE/1C our ALE/2 is a distributed UV-LED Exposure System that is directly integrated into photolithography equipment (e.g., mask aligners).

The ALE/2 features multiple LED arrays that provide powerful collimated exposure. Even on large substrates like Ø200 mm (8″ wafer), Ø300 mm (12″ wafer), 200 mm X 200 mm, or 300 mm X 300 mm, intensities beyond 100 mW/cm2 are achievable. Monospectral (CWL 365 nm, i-line only) or multispectral broadband (CWL 365 / 405 / 436 nm, i- / h- / g-line) output configurations are available.

More information on this high-performance UV-LED Exposure System will be released soon.

Are you ready for UV-LED exposure?