ALE/1C UV-LED Exposure Systems to Replace Conventional 1 kW Lamp Houses
Primelite’s UV-LED Exposure System Advanced Light Engine ONE C (ALE/1C) is a powerful spot light source for driving many high-performance industrial UV exposure tools. Typically these are semi-automated and automated mask aligners for 6″ (150 mm) and 8″ (200 mm) wafers or broadband wafer stepper systems (1X steppers / mini steppers). Featuring UV-LED technology, it outperforms conventional high-pressure mercury discharge lamps with excellent output stability and flexible spectrum control. It also consumes less power, does not generate as much heat, lasts longer, and requires minimal overall maintenance.
At Primelite, we have embraced the principle of building products to serve as a versatile platform. ALE/1C UV-LED Exposure Systems are no exception – they let you combine up to three UV LEDs in the optical path. In most cases, these are i-line (CWL 365 nm), h-line (CWL 405 nm), and g-line (CWL 436 nm) emitters with illumination power exceeding that of conventional 1-kW mercury discharge lamps.
ALE/1C UV-LED Exposure System Highlights:
- Built-in solution for maximum exposure efficiency and performance
- Up to 50 watts of broadband exposure (350 - 450 nm)
- Closed-loop controlled optical output for maximum process stability
- No mercury! Safe and future-proof LED light source
- UV-LED technology for longer life and lower TCO
- Premium, made-in-Germany quality
ALE/1C UV-LED Exposure System Overview
ALE/1C units feature distributed designs that facilitate system integration. Our compact UV-LED Exposure Subsystems (ESS) sit directly in the optical path of your equipment, where the design envelope usually poses a challenge. You can place our separate Control Subsystem (CSS), which manages the power supply and cooling of the entire setup, at a more convenient location with fewer space constraints. And feel free to combine the ALE/1C Exposure System’s light exit with various light pipes, light guides, and additional optics.
Control Subsystem (CSS)
The CSS comes in two versions, one with a very small footprint and another that takes up 4U in 19″ racks. Both feature the same control interfaces, cooling system connectors, and a system status indicator. The rack mount version also has an exposure test key switch on the front panel to activate light output without external control signals.
Exposure Subsystem (ESS)
ALE/1C UV-LED Exposure Subsystems are light pipe-coupled spot light sources. Connected to a separate Control Subsystem (CSS) and equipped with your choice of optics, our UV-LED Light Engines provide all hardware and software needed to control and drive the internal UV-LED emitters. The UV-LED Exposure Subsystem’s compact design makes integration so easy, either as a retrofit for your current equipment or as part of a new tool.
All LED modules are field-replaceable. Swapping LEDs takes just minutes with no special tools needed.
Light Exit Options
We offer a selection of homogenizing light pipes, flexible LED light guides, and condensing optics for you to combine with ALE/1C Exposure Subsystems. These components come in very handy if you wish to transmit high-power radiation over long distances, increase uniformity, or adjust the collimation angle of the output radiation.
ALE/1C UV-LED Exposure System Output
Our standard ALE/1C setup combines UV-LED emitters with peak wavelengths around the i-line (365 nm), h-line (405 nm), and g-line (436 nm) of the mercury spectrum. All UV-LED emitters are individually controllable, so you can switch wavelengths without changing filters and customize the composition of your output spectrum.
Spectrum
Angular Distribution (from Light Pipe)
Power
| Radiation [mW]1 | Optics | Broadband (350 - 450 nm) | i-line (365 nm) |
|---|---|---|---|
| ALE/1C (performance mode) | Ø8.0 mm HEX AR | 50,000 | 21,000 |
| ALE/1C (standard mode) | Ø8.0 mm HEX AR | 40,000 | 17,000 |
1Deviation of ±10% possible
Our ALE/1C delivers up to 40 W total output in standard mode and 50 W in performance mode. To activate the performance mode, you need an additional chiller in the cooling circuit to keep the coolant temperature below 20°C.
System Properties and Specifications
| Emitter options | 3 LEDs with CWL 365 nm, 405 nm, and 436 nm | ||
| Numerical aperture | Variable: NA 0.6 (2α ~70°) with light pipe only and down to NA 0.15 (2α ~17°) with condenser | ||
| Output control |
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| Communication interfaces |
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| Thermal management |
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| Dimensions (W H D) | ESS: | 20 X 13 X 20.5 cm | 7.9 X 5.1 X 8.1" |
| CSS: | 20 X 15 X 45 cm | 7.9 X 5.9 X 17.7" | |
| CSS (Rack): | 44 X 18 X 37 cm | 17.3 X 7.1 X 14.6" | |
| Weight | ESS: | 5 kg | 11 lbs |
| CSS: | 9 kg | 20 lbs | |
| CSS (Rack): | 10 kg | 22 lbs | |
| Power supply | 110-240 VAC / 50-60 Hz / 1,000 W | ||