Advanced UV-LED Light Engine TWO

The Most Powerful UV-LED Spot Light Source of All

ALE/2 UV-LED Exposure Systems to Replace Conventional 2 - 5 kW Lamp Houses

Primelite’s UV-LED Exposure System Advanced Light Engine TWO (ALE/2) is a high-performance UV spot light source for large substrate industrial flood exposure tools requiring perfectly uniform and collimated radiation. These may be 8″ (200 mm) or 12″ (300 mm) mask aligners. Its UV output is strong enough to power even larger setups with square exposure areas measuring up to 400 X 400 mm – and in some cases, beyond that. Featuring UV-LED technology, the ALE/2 outperforms conventional high-pressure mercury discharge lamps with excellent output stability and flexible spectrum control. It also consumes less power, does not generate as much heat, lasts longer, and requires minimal overall maintenance.

ALE/2 UV-LED Exposure Systems make the most of Primelite’s technology platform for you to combine four feedback-controlled high-power UV LEDs in the optical path. I-line (CWL 365 nm) and broadband (CWL 365 / 405 / 436 nm) configurations are available. In i-line-only processes, the ALE/2 UV-LED Exposure System matches the performance of conventional discharge lamps rated for up to 5,000 W. For broadband use cases, its illumination power rivals that of 2,000 W discharge lamps.

Primelite lithography UV-LED Exposure System Advanced Light Engine TWO
Primelite lithography UV-LED Exposure System ALE/2 (controller and exposure subsystem)

ALE/2 UV-LED Exposure System Highlights:

ALE/2 UV-LED Exposure System Overview

Our Advanced Light Engine TWO units feature a compact Exposure Subsystem (ESS) and a separate Control Subsystem (CSS). The CSS monitors and drives the ESS for ultra-precise optical output. It powers the high-power LEDs and manages heat to keep the entire system cool.

Much like a conventional lamp house, the ALE/2 ESS is an integral part of the exposure tool. Although the CSS has to be installed near the ESS, the allowable distances are generally great enough to give you far more design leeway.

Control Subsystem (CSS)

The Control Subsystem packs all control, power supply, and cooling functions into a 4U 19″ rack mount chassis. You can communicate with the unit in several ways, with the standard interfaces being discrete PLC, USB, or Ethernet.

Primelite Lithography UV-LED Control Subsystem Advanced Light Engine CSS
Primelite lithography UV-LED controller ALE CSS (rack mount)
Primelite Lithography UV-LED Exposure System Advanced Light Engine TWO
Primelite lithography UV-LED Exposure System ALE/2

Exposure Subsystem (ESS)

ALE/2 Exposure Subsystems come in i-line (CWL 365 nm) or broadband configurations comprising the i-, h-, and g-lines (CWL 365 / 405 / 436 nm). Each installed high-power LED Module has a dedicated optical closed-loop feedback control to keep the unit’s total power output stable at all times. Internal homogenizers and an aspherical condenser condition the outgoing radiation to achieve uniform illumination at the exposure plane.

All LED Modules are field-replaceable to minimize maintenance. Swapping LEDs takes mere minutes, with no special tools needed.

ALE/2 UV-LED Exposure System Output

Our standard ALE/2 setup combines LED Modules with peak wavelengths around the i-line (365 nm), h-line (405 nm), and g-line (436 nm) of the mercury spectrum. A pure i-line configuration is also available. All UV-LED emitters are individually controllable, so you can switch wavelengths without changing filters and customize the composition of your output spectrum.


Primelite UV-LED Exposure System ALE TWO: Spectral Power

Angular Distribution (from Condenser)

Primelite UV-LED Exposure System ALE TWO: Angular Distribution Pattern


Radiation [mW]1Broad­band (350 - 450 nm)i-line (365 nm)
ALE/2 (performance mode)80,00070,000
ALE/2 (standard mode)70,00060,000

1Deviation of ±10% possible

Our ALE/2 delivers up to 80 W total output in standard mode and 90 W in performance mode. To activate the performance mode, you need an additional chiller in the cooling circuit to keep the coolant temperature below 20°C.

System Properties and Specifications

Emitter options4 LEDs with CWL 365 nm, 385 nm, 405 nm, and 436 nm
Numerical apertureNA 0.3 (2α ~35°) with standard condenser
Output control
  • Individual LED power management and presets
  • High-resolution intensity adjustment (10-100%)
  • LED rise time approx. 1 millisecond
  • Continuous monitoring of optical output and feedback control
Communication interfaces
  • Discrete PLC interface (TTL)
  • USB (serial)
  • Ethernet / MODBUS TCP/IP (optional)
Thermal management
  • Liquid cooling with internal radiator (standard mode)
  • Optional external chiller (performance mode)
Dimensions (W H D)ESS:21 X 21 X 36 cm8.3 X 8.3 X 14.2"
CSS (Rack):44 X 18 X 37 cm17.3 X 7.1 X 14.6"
WeightESS:4 kg9 lbs
CSS (Rack):10 kg22 lbs
Power supply110-240 VAC / 50-60 Hz / 1,500 W

Next level UV-LED exposure!