ALE/2 UV-LED Exposure Systems to Replace Conventional 2 - 5 kW Lamp Houses
Primelite’s UV-LED Exposure System Advanced Light Engine TWO (ALE/2) is a high-performance UV spot light source for large substrate industrial flood exposure tools requiring perfectly uniform and collimated radiation. These may be 8″ (200 mm) or 12″ (300 mm) mask aligners. Its UV output is strong enough to power even larger setups with square exposure areas measuring up to 400 X 400 mm – and in some cases, beyond that. Featuring UV-LED technology, the ALE/2 outperforms conventional high-pressure mercury discharge lamps with excellent output stability and flexible spectrum control. It also consumes less power, does not generate as much heat, lasts longer, and requires minimal overall maintenance.
ALE/2 UV-LED Exposure Systems make the most of Primelite’s technology platform for you to combine four feedback-controlled high-power UV LEDs in the optical path. I-line (CWL 365 nm) and broadband (CWL 365 / 405 / 436 nm) configurations are available. In i-line-only processes, the ALE/2 UV-LED Exposure System matches the performance of conventional discharge lamps rated for up to 5,000 W. For broadband use cases, its illumination power rivals that of 2,000 W discharge lamps.
ALE/2 UV-LED Exposure System Highlights:
- Built-in solution for maximum exposure efficiency and performance
- Up to 70 watts of i-line exposure (CWL 365 nm)
- Up to 80 watts of broadband exposure (350 - 450 nm)
- Closed-loop controlled optical output for maximum process stability
- No mercury! Safe and future-proof LED light source
- UV-LED technology for longer life and lower TCO
- Premium, made-in-Germany quality
ALE/2 UV-LED Exposure System Overview
Our Advanced Light Engine TWO units feature a compact Exposure Subsystem (ESS) and a separate Control Subsystem (CSS). The CSS monitors and drives the ESS for ultra-precise optical output. It powers the high-power LEDs and manages heat to keep the entire system cool.
Much like a conventional lamp house, the ALE/2 ESS is an integral part of the exposure tool. Although the CSS has to be installed near the ESS, the allowable distances are generally great enough to give you far more design leeway.
Control Subsystem (CSS)
The Control Subsystem packs all control, power supply, and cooling functions into a 4U 19″ rack mount chassis. You can communicate with the unit in several ways, with the standard interfaces being discrete PLC, USB, or Ethernet.
Exposure Subsystem (ESS)
ALE/2 Exposure Subsystems come in i-line (CWL 365 nm) or broadband configurations comprising the i-, h-, and g-lines (CWL 365 / 405 / 436 nm). Each installed high-power LED Module has a dedicated optical closed-loop feedback control to keep the unit’s total power output stable at all times. Internal homogenizers and an aspherical condenser condition the outgoing radiation to achieve uniform illumination at the exposure plane.
All LED Modules are field-replaceable to minimize maintenance. Swapping LEDs takes mere minutes, with no special tools needed.
ALE/2 UV-LED Exposure System Output
Our standard ALE/2 setup combines LED Modules with peak wavelengths around the i-line (365 nm), h-line (405 nm), and g-line (436 nm) of the mercury spectrum. A pure i-line configuration is also available. All UV-LED emitters are individually controllable, so you can switch wavelengths without changing filters and customize the composition of your output spectrum.
Spectrum
Angular Distribution (from Condenser)
Power
| Radiation [mW]1 | Broadband (350 - 450 nm) | i-line (365 nm) |
|---|---|---|
| ALE/2 (performance mode) | 90,000 | 80,000 |
| ALE/2 (standard mode) | 80,000 | 70,000 |
1Deviation of ±10% possible
Our ALE/2 delivers up to 80 W total output in standard mode and 90 W in performance mode. To activate the performance mode, you need an additional chiller in the cooling circuit to keep the coolant temperature below 20°C.
System Properties and Specifications
| Emitter options | 4 LEDs with CWL 365 nm, 385 nm, 405 nm, and 436 nm | ||
| Numerical aperture | NA 0.3 (2α ~35°) with standard condenser | ||
| Output control |
|
||
| Communication interfaces |
|
||
| Thermal management |
|
||
| Dimensions (W H D) | ESS: | 21 X 21 X 36 cm | 8.3 X 8.3 X 14.2" |
| CSS (Rack): | 44 X 18 X 37 cm | 17.3 X 7.1 X 14.6" | |
| Weight | ESS: | 4 kg | 9 lbs |
| CSS (Rack): | 10 kg | 22 lbs | |
| Power supply | 110-240 VAC / 50-60 Hz / 1,500 W | ||