There is a strong trend in the industry to move away from conventional discharge lamp technology, which has long been the light source of choice in semiconductor lithography. Providing high-intensity UV exposure in the i-, h-, and g-line spectral ranges, the ALE/1 is capable of replacing mercury arc lamps up to a rated power of 1,000 W. Furthermore, there are many UV exposure applications (e.g., WEE) that can benefit from our system.
Visit us at booth No.3512 (East Hall 3) to discuss potential applications. If you are interested in meeting with us at the SEMICON please reach out to Maximilian Dicenta.
For further information on the tradeshow, see SEMICON Japan.