UV-LED Collimated Exposure

Make your flood exposure safer, more economical and reliable.

ALE/1C UV-LED exposure systems replace conventional 1 kW lamps

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Primelite Lithography UV-LED Exposure System ALE 1C

System highlights:

System overview

We offer a selection of homogenizing light pipes, flexible liquid light guides, and condensing optics which you can combine with ALE/1C Exposure Subsystems. These components may be particularly helpful if you need to transmit high-power radiation over long distances, increase uniformity, or want to adjust the collimation angle of the output radiation.
Primelite Lithography UV-LED Controller

Control Subsystem (CSS)

There are two versions of the CSS available: A low footprint stand-alone unit and a 4U 19″ rack mount unit. Both ALE CSS versions feature the same control interfaces, cooling system connectors, and a system status indicator. Additionally, the rack mount version provides an Exposure Test Key Switch on the front to activate light output without the requirement of external control signals.

Primelite Lithography UV-LED Exposure System ALE 1C

Exposure Subsystem (ESS)

ALE/1C UV-LED Exposure Subsystems are light pipe coupled spot light sources. Connected to a separate Control Subsystem (CSS) and equipped with your choice of optics, our UV-LED light engines provide all the hard- and software necessary to control and drive the internal UV-LED emitters. Beneficial is the compact design of the UV-LED Exposure Subsystem, which facilitates easy system integration into your existing equipment (retrofitting) or new tool designs.
Primelite LED Performance Optics

Light exit options

We offer a selection of homogenizing light pipes, flexible liquid light guides, and condensing optics which you can combine with ALE/1C Exposure Subsystems. These components may be particularly helpful if you need to transmit high-power radiation over long distances, increase uniformity, or want to adjust the collimation angle of the output radiation.

System output

Our standard ALE/1C setup combines UV-LED emitters with peak wavelengths around the i-line (365 nm), h-line (405 nm), and g-line (435 nm) of the mercury spectrum. All UV-LED emitters are individually controllable, allowing you to switch between wavelengths without changing filters and customize the composition of your output spectrum.

Spectrum

Primelite Advanced UV-LED Light Engine ONE C+ Spectrum

Angular distribution (from light pipe)

Primelite Lithography UV-LED Exposure System ALE 1C Angular Distribution

Power

Radiation [mW]1OpticsBroad­band (350 – 450 nm)i-line (365 nm)
ALE/1C (performance mode)Ø8.0 mm HEX AR50,00021,000
ALE/1C (standard mode)Ø8.0 mm HEX AR40,00017,000

1Deviation of ±10% possible

Total output of our ALE/1C is up to 40 W in standard mode and up to 50 W in perfromance mode. The performance mode can be activated with an additional chiller in the cooling circuit that keeps coolant temperatures below 20°C.

System Properties and Specifications

Emitter options3 LEDs with CWL 365 nm, 405 nm, and 436 nm
Numerical apertureVariable: NA 0.6 (2α ~70°) with light pipe only to NA 0.15 (2α ~17°) with condenser
Output control
  • Individual LED power management and presets
  • High-resolution intensity adjustment (10-100%)
  • LED rise time approx. 1 millisecond
  • Continuous monitoring of optical output and feedback control
Communication interfaces
  • Discrete PLC interface (TTL)
  • Ethernet / Modbus
  • USB (serial)
Thermal management
  • Liquid cooling with internal radiator (standard mode)
  • Optional external chiller (performance mode)
Dimensions (W H D)ESS:20 X 13 X 20.5 cm7.9 X 5.1 X 8.1″
CSS:20 X 15 X 45 cm7.9 X 5.9 X 17.7″
CSS (Rack):44 X 18 X 37 cm17.3 X 7.1 X 14.6″
WeightESS:5 kg11 lbs
CSS:9 kg20 lbs
CSS (Rack):10 kg22 lbs
Power supply110-240 VAC / 50-60 Hz / 1,000 W

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