An error-free reticle or photomask is crucial in achieving a high yield in photolithography applications. Reticle defects and contaminations lead to pattern placement errors being repeatedly replicated on production substrates. Reticle inspection systems help mask shops to qualify their photomasks. They are equally important for fabs: Chipmakers, flat panel display (FPD), and PCB manufacturers need to assess incoming reticle quality and re-qualify reticles periodically during production to protect their yield by reducing the risk of printing defective wafers and other substrates.
With the extensive use of photolithography in many different applications, the variety of reticles is almost endless. Primelite focuses on inspection tools using near UV (NUV), visible light (VIS), or near infrared (NIR) to identify defects and contaminations on large photomasks. We provide very powerful and flexible LED solutions to replace conventional mercury and xenon discharge lamp technology in these systems.
With the increasing demand for high-resolution flat panel displays in applications such as smartphones and tablets, our powerful LED solutions are particularly beneficial in reticle inspection tools for large photomasks. There are three convincing aspects for OEMs to integrate Primelite’s high-performance LED systems into their inspection equipment:
While other LED exposure solutions only provide a narrow wavelength band of inspection light (e.g., 385±15 nm), using our advanced LED systems, you can take advantage of an entirely customizable broadband output spectrum. Apart from central wavelengths matching the i-, h-, and g-line (365/405/436 nm) of conventional discharge lamps, you can complement the spectral range with additional VIS (e.g., blue and green) components. With our Advanced Light Engine ONE you can combine up to 5 high-power and individually feedback-controlled LEDs into a single optical path. Economic single- and dual-wavelength exposure setups are available based on our fiber-coupled UV-LED light source ALE/3.
|Output Power [mW]1||Broadband|
|ALE/1.3 (CWL 365, 405, and 436 nm) 2||30,000||10,000|
|ALE/3.2 (CWL 365 and 405 nm) 2||13,000||6,500|
|200 W Mercury Discharge Lamp (typical values)||7,500||3,000|
1Power output measured at end of light guide (active core dia. 6.5 mm, length 1.5 m), deviation of ±10% possible.
2CWL of emitters: 367.5±2.5 nm, 402.5±2.5 nm, and 435.0±2.5 nm.